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US Patent 11605932 Monolithically integrated mid-infrared two-dimensional optical phased array

Patent 11605932 was granted and assigned to Omega Optics, Inc. on March, 2023 by the United States Patent and Trademark Office.

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Patent

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Current Assignee
Omega Optics, Inc.
Omega Optics, Inc.
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11605932
Date of Patent
March 14, 2023
Patent Application Number
17093612
Date Filed
November 9, 2020
Patent Primary Examiner
‌
Yuanda Zhang
CPC Code
‌
H01S 5/026
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H01S 5/06246
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H01S 5/18386
‌
H01S 5/3402
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H01S 5/3406
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H01S 5/34313
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H01S 5/50
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H01S 5/1032

A novel, monolithically integrated mid-IR optical phased array (OPA) structure which eliminates the wafer bonding process to achieve highly efficient surface emitting optical beam steering in two dimensions is disclosed. Since solar energy is about 15-20 times smaller than that at 1.55 μm, mid-IR is more favorable for the atmospheric transmission due to lower solar radiance backgrounds. For the beam steering, thermo-optic phase shifting is used for azimuthal plane beam steering and laser wavelength tuning is used for elevation plane beam steering. The OPA structure disclosed comprises a wavelength-tunable a QCL, a 1×32 splitter, thermo-optic phase-shifters, and sub-wavelength grating emitters. The disclosed OPA provides a low-cost, low-loss, low-power consumption, robust, small footprint, apparatus that may be used with expendable UAV swarms. A LiDAR may be created by monolithically integrating a QCD with the apparatus. Other embodiments are described and claimed.

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