US Patent 11573247 Systems and methods for manufacturing nano-electro-mechanical-system probes
Patent 11573247 was granted and assigned to Xallent LLC on February, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 19, 2021
Date of Patent
February 7, 2023
Patent Applicant
Patent Application Number
17445448
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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