US Patent 11571211 Hermetic force sensors for surgical devices

A force sensor includes a substrate, a plurality of sensing elements, and a plate. The substrate includes a central aperture extending along a longitudinal axis of the substrate, and has a proximal surface, a distal surface, a first side surface, a second side surface, a top surface, and a bottom surface. A recess is defined in at least one of the distal surface, the first side surface, the second side surface, the top surface, or the bottom surface of the substrate. The plurality of sensing elements are disposed within the recess, and the plate is disposed over the recess and mounted to the substrate to hermetically seal the plurality of sensing elements within the substrate.