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US Patent 11563080 Trenched power device with segmented trench and shielding

Patent 11563080 was granted and assigned to Wolfspeed on January, 2023 by the United States Patent and Trademark Office.

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Is a
Patent
Patent

Patent attributes

Patent Applicant
Wolfspeed
Wolfspeed
Current Assignee
Wolfspeed
Wolfspeed
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11563080
Date of Patent
January 24, 2023
Patent Application Number
16863399
Date Filed
April 30, 2020
Patent Primary Examiner
‌
Fazli Erdem
CPC Code
‌
H01L 29/10
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H01L 29/1095
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H01L 29/16
‌
H01L 29/1608
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H01L 29/66
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H01L 29/66068
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H01L 29/78
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H01L 29/7813
...

A semiconductor device includes a semiconductor layer structure of a wide band-gap semiconductor material. The semiconductor layer structure includes a drift region having a first conductivity type and a well region having a second conductivity type. A plurality of segmented gate trenches extend in a first direction in the semiconductor layer structure. The segmented gate trenches include respective gate trench segments that are spaced apart from each other in the first direction with intervening regions of the semiconductor layer structure therebetween. Related devices and fabrication methods are also discussed.

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