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US Patent 11561560 Flow controller, valve arrangement and method

Patent 11561560 was granted and assigned to Festo on January, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Festo
Festo
Current Assignee
Festo
Festo
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11561560
Date of Patent
January 24, 2023
Patent Application Number
17409061
Date Filed
August 23, 2021
Patent Citations
‌
US Patent 10031005 Method and apparatus for self verification of pressure-based mass flow controllers
‌
US Patent 11105664 Apparatus and method for creating inferential process flow measurements using flow restrictor and upstream and downstream pressure measurements
Patent Primary Examiner
‌
William M McCalister
CPC Code
‌
Y10T 137/7761
‌
G05D 7/0623
‌
F16K 31/02
‌
F16K 37/0091
‌
G05D 7/0647

A flow controller includes a valve unit for influencing the flow of a fluid through a fluid channel, a flow sensor for detecting the flow of the fluid through the fluid channel, a pressure sensor arrangement for detecting a fluid pressure of the fluid, and a control unit which is adapted to, in response to the flow being within a measurement range of the flow sensor, assume a first operating mode, and, in the first operating mode, to perform a first closed-loop flow control on the basis of the flow detected by the flow sensor, and, in response to the flow being outside the measurement range of the flow sensor, assume a second operating mode, and, in the second operating mode, to perform an open-loop flow control on the basis of the detected fluid pressure and/or to perform a second closed-loop flow control on the basis of the detected fluid pressure.

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