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US Patent 11527419 Photonic integrated package and method forming same

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Is a
Patent
Patent

Patent attributes

Current Assignee
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11527419
Date of Patent
December 13, 2022
Patent Application Number
17020245
Date Filed
September 14, 2020
Patent Citations
‌
US Patent 10527790 Passive fiber coupler with UV windows
‌
US Patent 10388608 Semiconductor device and method for manufacturing same
‌
US Patent 10510674 Fan-out package having a main die and a dummy die, and method of forming
‌
US Patent 10162139 Semicondcutor package
Patent Primary Examiner
‌
Nikolay K Yushin
CPC Code
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H01L 21/28167
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H01L 21/823807
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H01L 21/823857
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H01L 23/3121
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H01L 23/3171
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H01L 23/5226
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H01L 23/5283
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H01L 23/5383
...

A method includes placing an electronic die and a photonic die over a carrier, with a back surface of the electronic die and a front surface of the photonic die facing the carrier. The method further includes encapsulating the electronic die and the photonic die in an encapsulant, planarizing the encapsulant until an electrical connector of the electronic die and a conductive feature of the photonic die are revealed, and forming redistribution lines over the encapsulant. The redistribution lines electrically connect the electronic die to the photonic die. An optical coupler is attached to the photonic die. An optical fiber attached to the optical coupler is configured to optically couple to the photonic die.

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