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US Patent 11515300 Semiconductor memory device

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
115153000
Patent Inventor Names
Moto Yabuki0
Natsuki Fukuda0
Atsushi Oga0
Date of Patent
November 29, 2022
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Patent Application Number
170168270
Date Filed
September 10, 2020
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Patent Citations
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US Patent 10727215 Three-dimensional memory device with logic signal routing through a memory die and methods of making the same
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US Patent 11211394 Three-dimensional memory device with source structure and methods for forming the same
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US Patent 10276585 Semiconductor memory device
Patent Primary Examiner
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Nathan W Ha
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CPC Code
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H01L 27/11582
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H01L 24/05
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H01L 21/76224
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H01L 25/18
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H01L 24/08
0

A semiconductor memory device includes a first chip and a second chip. The first chip includes a semiconductor substrate and a plurality of transistors disposed on a surface of the semiconductor substrate. The second chip includes a plurality of first conductive layers, a plurality of first semiconductor layers, and a plurality of memory cells disposed in intersection portions of the plurality of first conductive layers and the plurality of first semiconductor layers. The second chip includes a second semiconductor layer farther from the semiconductor substrate than the plurality of first conductive layers. The second semiconductor layer is connected to the plurality of first semiconductor layers and a first insulating layer that includes a part farther from the semiconductor substrate than a surface on a side opposite to the semiconductor substrate of the second semiconductor layer and a part closer to the semiconductor substrate than the surface.

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