US Patent 11501956 Semiconductor reaction chamber showerhead
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Patent Jurisdiction
Patent Number
115019560
Date of Patent
November 15, 2022
0Patent Application Number
168784430
Date Filed
May 19, 2020
0Patent Primary Examiner
CPC Code
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US Patent 11501956 Semiconductor reaction chamber showerhead
Article
A showerhead including a body having an opening, a first plate positioned within the opening and having a plurality of slots, a second plate positioned within the opening and having a plurality of slots, and wherein each of the first plate plurality of slots are concentrically aligned with the second plate plurality of slots.
Infobox
Is a
Patent Jurisdiction
Patent Number
115019560
Date of Patent
November 15, 2022
0Patent Application Number
168784430
Date Filed
May 19, 2020
0Patent Primary Examiner
CPC Code
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