US Patent 11476289 Photodetector with buried airgap reflectors
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Edits on 2 Apr, 2023
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Edits on 24 Mar, 2023
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Patent Applicant
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Patent Jurisdiction
Patent Number
114762890
Date of Patent
October 18, 2022
0Patent Application Number
168420800
Date Filed
April 7, 2020
0Patent Citations
Patent Primary Examiner
Edits on 28 Oct, 2022
Golden AI
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US Patent 11476289 Photodetector with buried airgap reflectors
Article
The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114762890
Date of Patent
October 18, 2022
0Patent Application Number
168420800
Date Filed
April 7, 2020
0Patent Citations
Patent Primary Examiner
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