US Patent 11462392 Plasma processing apparatus

Patent

US Patent 10157729 Soft pulsing

US Patent 10224463 Film forming method, method of manufacturing semiconductor light-emitting device, semiconductor light-emitting device, and illuminating device

US Patent 10231321 State-based adjustment of power and frequency

US Patent 10354838 RF antenna producing a uniform near-field Poynting vector

US Patent 10410889 Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors

US Patent 10544505 Deposition or treatment of diamond-like carbon in a plasma reactor

US Patent 10553406 Plasma generating apparatus and substrate processing apparatus

US Patent 10685810 RF antenna producing a uniform near-field Poynting vector

US Patent 10879043 Device intrinsically designed to resonate, suitable for RF power transfer as well as group including such device and usable for the production of plasma

US Patent 11013075 RF apparatus with arc prevention using non-linear devices

United States Patent and Trademark Office

Srinivas Sathiraju