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US Patent 11437784 Compact emitter design for a vertical-cavity surface-emitting laser

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Is a
Patent
Patent

Patent attributes

Patent Applicant
Lumentum
Lumentum
Current Assignee
Lumentum
Lumentum
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11437784
Date of Patent
September 6, 2022
Patent Application Number
16797600
Date Filed
February 21, 2020
Patent Citations
‌
US Patent 10574031 Compact emitter design for a vertical-cavity surface-emitting laser
Patent Primary Examiner
‌
Tuan N Nguyen
CPC Code
‌
H01L 2224/32165
‌
H01L 21/28105
‌
H01S 5/18372
‌
H01S 5/18369
‌
H01S 5/2063
‌
H01L 21/76235
‌
H01L 21/762

A surface emitting laser may include an isolation layer including a first center portion and a first plurality of outer portions extending from the first center portion, and a metal layer including a second center portion and a second plurality of outer portions extending from the second center portion. The metal layer may be formed on the isolation layer such that a first outer portion, of the second plurality of outer portions, is formed over one of the first plurality of outer portions. The surface emitting laser may include a passivation layer including a plurality of openings. An opening may be formed over the first outer portion. The surface emitting laser may include a plurality of oxidation trenches. An oxidation trench may be positioned at least partially between the first outer portion and a second outer portion of the second plurality of outer portions.

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