US Patent 11428642 Scanning scatterometry overlay measurement
Patent 11428642 was granted and assigned to KLA on August, 2022 by the United States Patent and Trademark Office.
Is a
Date Filed
January 4, 2021
Date of Patent
August 30, 2022
Patent Application Number
17140999
Patent Citations
Patent Inventor Names
Amnon Manassen
0
Andrew V. Hill
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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