US Patent 11427908 Manifold valve for multiple precursors
Patent 11427908 was granted and assigned to Lam Research on August, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 30, 2019
0
Date of Patent
August 30, 2022
0
Patent Applicant
Patent Application Number
16966831
0
Patent Citations Received
Patent Inventor Names
Damodar Rajaram Shanbhag
0
Nagraj Shankar
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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