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US Patent 11404554 Transistor gates and method of forming

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Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114045540
Patent Inventor Names
Chi On Chui0
Hsin-Yi Lee0
Cheng-Lung Hung0
Date of Patent
August 2, 2022
0
Patent Application Number
169423100
Date Filed
July 29, 2020
0
Patent Citations Received
‌
US Patent 12119392 Semiconductor device and method
0
Patent Primary Examiner
‌
Yu-Hsi D Sun
0
CPC Code
‌
H01L 2029/7858
0

A device includes a first nanostructure; a second nanostructure over the first nanostructure; a first high-k gate dielectric around the first nanostructure; a second high-k gate dielectric around the second nanostructure; and a gate electrode over the first and second high-k gate dielectrics. A portion of the gate electrode between the first nanostructure and the second nanostructure comprises: a first p-type work function metal; a barrier material over the first p-type work function metal; and a second p-type work function metal over the barrier material, the barrier material physically separating the first p-type work function metal from the second p-type work function metal.

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