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US Patent 11404246 Nanosecond pulser bias compensation with correction

Patent 11404246 was granted and assigned to Eagle Harbor Technologies, Inc. on August, 2022 by the United States Patent and Trademark Office.

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Patent Inventor Names
Alex Henson0
Ilia Slobodov0
James Prager0
John Carscadden0
Kenneth Miller0
Morgan Quinley0
Timothy Ziemba0
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Patent Citations Received
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US Patent 11636998 Nanosecond pulser pulse generation
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
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Current Assignee
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
114042460
Date of Patent
August 2, 2022
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Patent Application Number
170997290
Date Filed
November 16, 2020
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Patent Citations
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US Patent 10009024 Power conversion device, driving device and driving method
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US Patent 10020800 High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
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US Patent 10027314 Nonlinear transmission line high voltage pulse sharpening
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US Patent 10217608 Switching circuit for RF currents
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US Patent 10224822 Nanosecond pulser
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US Patent 10301587 Compact subnanosecond high voltage pulse generation system for cell electro-manipulation
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US Patent 10304661 Arbitarary waveform generation using nanosecond pulses
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US Patent 10373755 High voltage transformer
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US Patent 10373804 System for tunable workpiece biasing in a plasma reactor
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US Patent 10382022 High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
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US Patent 10448494 Method of controlling ion energy distribution using a pulse generator with a current-return output stage
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US Patent 10460910 High voltage resistive output stage circuit
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US Patent 10460911 High voltage resistive output stage circuit
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US Patent 10483089 High voltage resistive output stage circuit
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US Patent 10483090 Restricted capacitor switching
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US Patent 10510575 Substrate support with multiple embedded electrodes
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US Patent 10555412 Method of controlling ion energy distribution using a pulse generator with a current-return output stage
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US Patent 10607814 High voltage switch with isolated power
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US Patent 10631395 Inductively coupled pulsed RF voltage multiplier
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US Patent 10659019 Nanosecond pulser ADC system
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US Patent 10777388 Arbitrary waveform generation using digital pulses
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US Patent 10796887 Efficient nanosecond pulser with source and sink capability for plasma control applications
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US Patent 10876241 Clothes pre-wash compartment for an appliance
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US Patent 10892140 Nanosecond pulser bias compensation
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US Patent 10896809 High voltage switch with isolated power
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Patent Primary Examiner
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Henry Luong
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CPC Code
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H01J 37/32174
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H01J 37/32146
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H01J 37/321
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H01J 37/32091
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H03K 3/02
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