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US Patent 11361934 Ion source device
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Current Assignee
Sumitomo Heavy Industries
Date Filed
March 16, 2020
Date of Patent
June 14, 2022
Patent Applicant
Sumitomo Heavy Industries
Patent Application Number
16820016
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11361934
Patent Primary Examiner
Wei (Victor) Y Chan
CPC Code
H01J 37/063
H01J 37/32449
H01J 37/32788
H01J 2237/002
H01J 37/023
H01J 37/08
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