US Patent 11360387 Silicon-containing underlayers
Is a
Date Filed
June 29, 2018
Date of Patent
June 14, 2022
Patent Application Number
16022874
Patent Inventor Names
Shintaro Yamada
0
Suzanne M. Coley
0
Charlotte A. Cutler
0
Iou-Sheng Ke
0
James F. Cameron
0
Li Cui
0
Paul J. LaBeaume
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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