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US Patent 11349001 Replacement gate cross-couple for static random-access memory scaling

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Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

Veeraraghavan Basker0

Carl Radens0

Juntao Li0

Kangguo Cheng0

Ruilong Xie0

Date of Patent

May 31, 2022

Patent Application Number

16598065

Date Filed

October 10, 2019

Patent Citations

US Patent 10163915 Vertical SRAM structure

US Patent 10326002 Self-aligned gate contact and cross-coupling contact formation

0

US Patent 10204861 Structure with local contact for shorting a gate electrode to a source/drain region

US Patent 10056377 Metal layer routing level for vertical FET SRAM and logic cell scaling

US Patent 10083971 Vertical SRAM structure with cross-coupling contacts penetrating through common gates to bottom S/D metal contacts

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US Patent 10090193 Integrated circuit structure incorporating a stacked pair of field effect transistors and a buried interconnect and method

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US Patent 10109637 Cross couple structure for vertical transistors

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Patent Citations Received

US Patent 11538814 Static random access memory of 3D stacked devices

Patent Primary Examiner

CPC Code

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A method of fabricating a static random-access memory (SRAM) device includes forming a sacrificial material and replacing the sacrificial material with a metal to form a cross-couple contact on a metal gate stack. A portion of the metal gate stack directly contacts each of a sidewall and an endwall of the cross-couple contact.

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