US Patent 11340283 Testing device
Patent 11340283 was granted and assigned to Tokyo Electron on May, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 19, 2019
Date of Patent
May 24, 2022
Patent Applicant
Patent Application Number
16976672
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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