Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 17, 2022
Patent Application Number
16706776
Date Filed
December 8, 2019
Patent Citations
Patent Primary Examiner
A method of handling a micro device is provided. The method includes: holding the micro device by a transfer head; forming a liquid layer between the micro device and a substrate; maintaining a first temperature of the transfer head to be lower than an environmental temperature; maintaining a second temperature of the substrate to be lower than the environmental temperature; and binding the micro device to the substrate by the liquid layer.
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