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US Patent 11329102 Resistive memory device and manufacturing method thereof

Patent 11329102 was granted and assigned to Winbond on May, 2022 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
Winbond
Winbond
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Current Assignee
Winbond
Winbond
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
113291020
Patent Inventor Names
Masaru Yano0
Date of Patent
May 10, 2022
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Patent Application Number
171338910
Date Filed
December 24, 2020
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Patent Citations
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US Patent 10115895 Vertical field effect transisitors having a rectangular surround gate and method of making the same
Patent Primary Examiner
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Michael T. Tran
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CPC Code
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H01L 45/1683
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H01L 27/2463
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H01L 27/2481
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H01L 45/12
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H01L 45/16
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H01L 45/122
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H01L 45/1226
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H01L 45/1233
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...

Provide a resistive random-access memory device having an optimized 3D construction. A resistive random-access memory includes a plurality of pillars, a plurality of bit lines, and a memory cell. The pillars extend vertically along the main surface of the substrate. The bit lines extend in a horizontal direction. The memory cell is formed at the intersection of the pillars and the bit lines. The memory cell includes a gate insulating film, a semiconductor film, and a resistive element. The gate insulating film is formed on the circumference of the pillar. The semiconductor film is formed on the circumference of gate insulating film and provides a channel area. The resistive element is formed on the circumference of the semiconductor film. A first electrode area on the circumference of the resistive element and a second electrode area facing the first electrode area are electrically connected to a pair of adjacent bit lines.

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