US Patent 11315832 Wafer singulation process control
Patent 11315832 was granted and assigned to ONTO INNOVATION INC. on April, 2022 by the United States Patent and Trademark Office.
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Edits on 29 Apr, 2023
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
113158320
Date of Patent
April 26, 2022
0Patent Application Number
160677480
Date Filed
December 23, 2016
0Patent Primary Examiner
CPC Code
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
113158320
Date of Patent
April 26, 2022
0Patent Application Number
160677480
Date Filed
December 23, 2016
0Patent Primary Examiner
CPC Code
Edits on 19 May, 2022
Golden AI
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Article (+297 characters)
US Patent 11315832 Wafer singulation process control
Article
A method for monitoring and controlling a substrate singulation process is described. Device edges are imaged and identified for analysis. Discrepancies in device edges are noted and used to modify a singulation process and to monitor the operation of singulation processes for anomalous behavior.
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11315832
Date of patent
April 26, 2022
Patent application number
16067748
Date Filed
December 23, 2016
Patent primary examiner
CPC Code
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