US Patent 11309167 Active gas generation apparatus and deposition processing apparatus
Patent 11309167 was granted and assigned to Toshiba on April, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 25, 2018
Date of Patent
April 19, 2022
Patent Applicant
Patent Application Number
17050853
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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