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US Patent 11307403 Synchronization of microelectromechanical system (MEMS) mirrors

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TimelineTable: Further ResourcesReferences
Is a
Patent
Patent

Patent attributes

Patent Applicant
Infineon Technologies
Infineon Technologies
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11307403
Date of Patent
April 19, 2022
Patent Application Number
16376544
Date Filed
April 5, 2019
Patent Citations
‌
US Patent 10514292 Optical probe and measuring apparatus utilizing resonant scanners driven in synchronization with separate and coaxial drive axes
‌
US Patent 10654708 Optical scanner module and optical scanner control apparatus
Patent Citations Received
‌
US Patent 12001010 Synchronization of microelectromechanical system (MEMS) mirrors
5
Patent Primary Examiner
‌
Christopher Stanford
CPC Code
‌
G02B 26/085
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G02B 26/105
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G02B 26/0833
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G02B 26/0841
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G02B 26/10
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G02B 21/0076
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G02B 26/122
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G02B 26/101
...

A multi-mirror system includes a first mirror configured to oscillate about a first axis; a second mirror configured to oscillate about a second axis; a first driver configured to drive an oscillation of the first mirror, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive an oscillation of the second mirror, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first and the second position signals.

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