Golden has been acquired by ComplyAdvantage.Read about it here ⟶

‌

US Patent 11274369 Thin film deposition method

Overview Structured Data Issues Contributors Activity

Is a

Date Filed

September 9, 2019

Date of Patent

March 15, 2022

Patent Application Number

16565460

Patent Citations

US Patent 10590531 Substrate processing apparatus, and method of manufacturing semiconductor device

US Patent 10622236 Apparatus and method for handling wafer carrier doors

US Patent 10648788 Substrate distance monitoring

US Patent 10662525 Thin film deposition apparatus

US Patent 10704143 Oxide film forming method

US Patent 10714335 Method of depositing thin film and method of manufacturing semiconductor device

US Patent 10731249 Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

US Patent 10734497 Methods for forming a semiconductor device structure and related semiconductor device structures

US Patent 10741386 Deposition of SiN

US Patent 10763139 Vacuum transfer module and substrate processing apparatus

•••

Patent Citations Received

US Patent 11758641 Power supply system for improving plasma uniformity and method thereof

US Patent 11610764 Plasma source and method of operating the same

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Primary Examiner

Katherine A. Bareford

CPC Code

Find more entities like US Patent 11274369 Thin film deposition method

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.

Open Query Tool

Golden Query Tool

By using this site, you agree to our Terms of Service.