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US Patent 11268630 Direct-drive flexure-mechanism vacuum control valve

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
August 6, 2019
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Date of Patent
March 8, 2022
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Patent Applicant
Persimmon Technologies Corporation
Persimmon Technologies Corporation
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Patent Application Number
16533119
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Patent Citations
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US Patent 10224232 Robot having two arms with unequal link lengths
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US Patent 10269604 Substrate transport vacuum platform
Patent Citations Received
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US Patent 11458512 Systems and methods for rotating and translating a substrate in a process chamber
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US Patent 11476129 Translating and rotating chuck for processing microelectronic substrates in a process chamber
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US Patent 11545387 Magnetic integrated lift pin system for a chemical processing chamber
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US Patent 11629796 Vacuum valve and actuator used in vacuum valve
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US Patent 11767931 Vacuum valve for loading and/or unloading a vacuum chamber
Patent Inventor Names
Martin Hosek
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11268630
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Patent Primary Examiner
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Matthew W Jellett
0

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