US Patent 11248294 Substrate processing apparatus
Patent 11248294 was granted and assigned to Tokyo Electron on February, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 10, 2018
Date of Patent
February 15, 2022
Patent Applicant
Patent Application Number
15976354
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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