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US Patent 11232963 Substrate processing apparatus and method

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Date Filed
October 3, 2018
Date of Patent
January 25, 2022
Patent Application Number
16151074
Patent Citations
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US Patent 10269558 Method of forming a structure on a substrate
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US Patent 10297440 Method of manufacturing semiconductor device
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US Patent 10312055 Method of depositing film by PEALD using negative bias
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US Patent 10312129 Variable adjustment for precise matching of multiple chamber cavity housings
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US Patent 10319588 Method for depositing a metal chalcogenide on a substrate by cyclical deposition
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US Patent 10322384 Counter flow mixer for process chamber
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US Patent 10332963 Uniformity tuning of variable-height features formed in trenches
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US Patent 10032628 Source/drain performance through conformal solid state doping
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US Patent 10014212 Selective deposition of metallic films
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US Patent 10017856 Flowable gapfill using solvents
•••
Patent Citations Received
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US Patent 11929272 Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
58
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US Patent 11703229 Temperature adjustment apparatus for high temperature oven
59
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US Patent 11918715 Polarized LED filtration system
60
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11232963
Patent Primary Examiner
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Ibrahime A Abraham

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