US Patent 11187979 Imprint apparatus, imprint method, and article manufacturing method

An imprint apparatus comprises a mold holder configured to move while holding the mold, and a substrate holder including a plurality of suction regions for chucking the substrate and configured to move while holding the substrate. When performing the mold separation, among the plurality of suction regions, a suction force of a suction region at a position where the mold is to be separated from the imprint material is made weaker than a suction force of a suction region on a peripheral side of the substrate than the position where the mold is to be separated, and the mold holder is tilted after at least one of the mold holder and the substrate holder is moved by a predetermined amount so as to widen a gap between the mold and the substrate.