Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 16, 2021
Patent Application Number
16582694
Date Filed
September 25, 2019
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a substrate, semiconductor wires disposed over the substrate, a gate structure wrapping around each of the semiconductor wires, and an epitaxial source/drain (S/D) feature in contact with the semiconductor wires. A portion of the epitaxial S/D feature is horizontally surrounded by an air gap.
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