US Patent 11175589 Automatic wavelength or angle pruning for optical metrology

Automatic wavelength or angle pruning for optical metrology is described. An embodiment of a method for automatic wavelength or angle pruning for optical metrology includes determining a model of a structure including a plurality of parameters; designing and computing a dataset of wavelength-dependent or angle-dependent data for the model; storing the dataset in a computer memory; performing with a processor an analysis of the dataset for the model including applying an outlier detection technology on the dataset, and identifying any data outliers, each data outlier being a wavelength or angle; and, if any data outliers are identified in the analysis of the dataset of the model, removing the wavelengths or angles corresponding to the data outliers from the dataset to generate a modified dataset, and storing the modified dataset in the computer memory.