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US Patent 11171040 Removing polymer through treatment
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Is a
Patent
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Date Filed
November 29, 2018
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Date of Patent
November 9, 2021
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Patent Applicant
Taiwan Semiconductor Manufacturing Company
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Patent Application Number
20181129
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Patent Inventor Names
Yu-Cheng Liu
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Horng-Huei Tseng
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Hung-Hao Chen
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Wen-Tung Chen
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Che-Cheng Chang
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11171040
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Patent Primary Examiner
Mohammad M Choudhry
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