Patent attributes
A calibration method is executed in an analysis device including a spectroscopic element for diffracting a signal generated from a specimen by irradiating the specimen with a primary beam, and a detector that detects the signal diffracted by the spectroscopic element, the detector having a plurality of detection regions arranged in an energy dispersion direction, and the detector detecting the signal to acquire a spectrum of the signal. The calibration method includes determining energy of the signal detected in each of the plurality of detection regions based on a positional relationship between the specimen and the spectroscopic element and a positional relationship between the spectroscopic element and each of the plurality of detection regions.
