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Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroshi Motono0
Akifusa Higuchi0
Hideaki Takahashi0
Shiro Umegaki0
Yoshiyasu Ito0
Katsutaka Horada0
Kazuhiko Omote0
Kiyoshi Ogata0
...
Date of Patent
August 3, 2021
Patent Application Number
20180905
Date Filed
September 5, 2018
Patent Citations Received
Patent abstract
An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.
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