Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Stephen Prouty0
Andreas Schmid0
Steven E. Babayan0
Yogananda Sarode Vishwanath0
Date of Patent
July 27, 2021
0Patent Application Number
161035310
Date Filed
August 14, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.
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