Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ajith Uvais0
Steve E. Bishop0
Date of Patent
June 29, 2021
0Patent Application Number
166570230
Date Filed
October 18, 2019
0Patent Citations Received
Patent Primary Examiner
0
Patent abstract
Described are boron-doped amorphous carbon hard masks, methods of preparing boron-doped amorphous carbon hard masks, methods of using the boron-doped amorphous carbon hard masks, and devices that include the boron-doped amorphous carbon hard masks.
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