US Patent 11049694 Modular microwave source with embedded ground surface
Patent 11049694 was granted and assigned to Applied Materials on June, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 27, 2019
Date of Patent
June 29, 2021
Patent Applicant
Patent Application Number
16586597
Patent Citations
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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