US Patent 11043387 Methods and apparatus for processing a substrate
Patent 11043387 was granted and assigned to Applied Materials on June, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 30, 2019
Date of Patent
June 22, 2021
Patent Applicant
Patent Application Number
16668107
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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