Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert J. Fox, III0
Lili Cheng0
Luke England0
Date of Patent
June 15, 2021
0Patent Application Number
166670370
Date Filed
October 29, 2019
0Patent Citations
Patent Primary Examiner
0
Patent abstract
Methods of fabricating a structure for a metal-insulator-metal (MIM) capacitor. Conductive nanofibers are formed on a surface of a conductor layer. Each conductive nanofiber is terminated by an enlarged tip portion opposite the surface of the conductor layer. The enlarged tip portion is removed from each conductive nanofiber. The MIM capacitor may include the conductive nanofibers as portions of an electrode.
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