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US Patent 11022757 Using an anti-reflection coating with a grating coupler

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Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11022757
Date of Patent
June 1, 2021
Patent Application Number
16696957
Date Filed
November 26, 2019
Patent Citations
‌
US Patent 10459163 Photonic chip with folding of optical path and integrated collimation structure
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US Patent 10209442 Photonic chip with reflecting structure for folded optical path
‌
US Patent 10146020 MEMS steering mirrors for applications in photonic integrated circuits
Patent Primary Examiner
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Ryan A Lepisto
Patent abstract

Embodiments herein describe a photonic platform where an AR coating is disposed between an optical grating and a semiconductor substrate. In one embodiment, the optical grating is disposed within an insulative layer. A first side of the insulative layer provides an optical interface where an external optical source can transmit an optical signal into, or a receive an optical signal from, the grating. A second, opposite side of the insulative layer contacts the AR coating. When the external optical source transmits light through the first side of the insulative layer, some of the light passes through the grating and reaches the AR coating. The AR coating prevents this light from being reflected back to the grating by the semiconductor layer which can cause interference that varies the coupling efficiency of the grating.

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