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US Patent 10998690 Acousto-optic tuning of lasers

Patent 10998690 was granted and assigned to Pranalytica, Inc. on May, 2021 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
Pranalytica, Inc.
Pranalytica, Inc.
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Current Assignee
Pranalytica, Inc.
Pranalytica, Inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
109986900
Patent Inventor Names
Arkadiy Lyakh0
C. Kumar N. Patel0
Date of Patent
May 4, 2021
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Patent Application Number
168424460
Date Filed
April 7, 2020
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Patent Citations
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US Patent 10615562 Acousto-optic tuning of lasers
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US Patent 10230210 Acousto-optic tuning of lasers
Patent Citations Received
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US Patent 11966171 Method for producing overlay results with absolute reference for semiconductor manufacturing
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US Patent 11526088 Coaxial see-through alignment imaging system
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US Patent 11630397 Method for producing overlay results with absolute reference for semiconductor manufacturing
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US Patent 11264777 Acousto-optic tuning of lasers
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US Patent 11640118 Method of pattern alignment for field stitching
0
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US Patent 11513445 Tunable wavelength see-through layer stack
Patent Primary Examiner
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Yuanda Zhang
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Patent abstract

A semiconductor laser tuned with an acousto-optic modulator. The acousto-optic modulator may generate standing waves or traveling waves. When traveling waves are used, a second acousto-optic modulator may be used in a reverse orientation to cancel out a chirp created in the first acousto-optic modulator. The acousto-optic modulator may be used with standing-wave laser resonators or ring lasers.

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