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US Patent 10948423 Sensitive particle detection with spatially-varying polarization rotator and polarizer

Patent 10948423 was granted and assigned to KLA on March, 2021 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
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Current Assignee
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
109484231
Patent Inventor Names
Jenn-Kuen Leong1
Daniel Kavaldjiev1
John Fielden1
Xuefeng Liu1
Date of Patent
March 16, 2021
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Patent Application Number
165773261
Date Filed
September 20, 2019
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Patent Citations Received
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US Patent 11879853 Continuous degenerate elliptical retarder for sensitive particle detection
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US Patent 11525777 Optimizing signal-to-noise ratio in optical imaging of defects on unpatterned wafers
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US Patent 11474437 Increasing signal-to-noise ratio in optical imaging of defects on unpatterned wafers
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Patent Primary Examiner
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Christina A Riddle
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Patent abstract

A dark-field inspection system may include an illumination source to generate an illumination beam, illumination optics configured to direct the illumination beam to a sample at an off-axis angle along an illumination direction, collection optics to collect scattered light from the sample in response to the illumination beam in a dark-field mode, a polarization rotator located at a pupil plane of the one or more collection optics, where the polarization rotator provides a spatially-varying polarization rotation angle selected to rotate light scattered from a surface of the sample to a selected polarization angle, a polarizer aligned to reject light polarized along the selected polarization angle to reject the light scattered from a surface of the sample, and a detector to generate a dark-field image of the sample based on scattered light from the sample passed by the polarizer.

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