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US Patent 10946634 Transfer device, curing system and curing method

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10946634
Date of Patent
March 16, 2021
Patent Application Number
16111083
Date Filed
August 23, 2018
Patent Citations
‌
US Patent 10072336 Film forming apparatus, film forming method, and recording medium
Patent Citations Received
‌
US Patent 11699610 Rotational indexer with additional rotational axes
4
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US Patent 11482436 Rotational indexer with additional rotational axes
Patent Primary Examiner
‌
Michael N Orlando
Patent abstract

Embodiments of the present disclosure provide a transfer device, a curing system with the transfer device and a curing method using the curing system. The transfer device includes: a mount; a rotary stage mounted to the mount and configured to be rotatable about a first axis; and a rotary table mounted to the rotary stage and configured to be rotatable about a second axis.

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