US Patent 10941489 Rotary friction welded blank for PECVD heated showerhead
Patent 10941489 was granted and assigned to Lam Research on March, 2021 by the United States Patent and Trademark Office.
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Patent abstract
A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.
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Patent Inventor Names
Eric Madsen0
Kurt Kern0
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
109414890
Date of Patent
March 9, 2021
0Patent Application Number
163563870
Date Filed
March 18, 2019
0Official Website
Patent Primary Examiner
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US Patent 10941489 Rotary friction welded blank for PECVD heated showerhead
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10941489
Date of patent
March 9, 2021
Patent application number
16356387
Date Filed
March 18, 2019
Patent primary examiner
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