Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zuoming Zhu0
Yi-Chiau Huang0
Zhepeng Cong0
Zhiyuan Ye0
Anhthu Ngo0
Anzhong Chang0
Balasubramanian Ramachandran0
Edric Tong0
...
Date of Patent
February 23, 2021
0Patent Application Number
161099450
Date Filed
August 23, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment, a susceptor for thermal processing is provided. The susceptor includes an outer rim surrounding and coupled to an inner dish, the outer rim having an inner edge and an outer edge. The susceptor further includes one or more structures for reducing a contacting surface area between a substrate and the susceptor when the substrate is supported by the susceptor. At least one of the one or more structures is coupled to the inner dish proximate the inner edge of the outer rim.
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