Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Uday Mitra0
Amrita B. Mullick0
Regina Freed0
Date of Patent
January 12, 2021
0Patent Application Number
162900320
Date Filed
March 1, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
Methods to remove metal oxides from substrate surfaces are described. Some embodiments of the disclosure utilize an aqueous alkaline solution to remove metal oxides from substrate surfaces using a wet method. Some embodiments of the disclosure are performed at atmospheric pressure and lower temperatures. Methods of forming self-aligned vias are also described.
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