US Patent 10774588 Cluster tool system with step ladder assembly
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Patent Number
107745880
Date of Patent
September 15, 2020
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165239570
Date Filed
July 26, 2019
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US Patent 10774588 Cluster tool system with step ladder assembly
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10774588
Date of patent
September 15, 2020
Patent application number
16523957
Date Filed
July 26, 2019
Patent citations
Patent primary examiner
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