US Patent 10748748 RF impedance model based fault detection
Patent 10748748 was granted and assigned to Lam Research on August, 2020 by the United States Patent and Trademark Office.
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Patent Number
107487480
Date of Patent
August 18, 2020
0Patent Application Number
161672390
Date Filed
October 22, 2018
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US Patent 10748748 RF impedance model based fault detection
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10748748
Date of patent
August 18, 2020
Patent application number
16167239
Date Filed
October 22, 2018
Patent primary examiner
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