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US Patent 10699953 Method for creating a fully self-aligned via

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Is a
Patent
Patent
1

Patent attributes

Patent Applicant
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Micromaterials, Inc
1
Current Assignee
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Micromaterials, Inc
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
106999531
Date of Patent
June 30, 2020
1
Patent Application Number
164250201
Date Filed
May 29, 2019
1
Patent Citations
‌
US Patent 10319604 Methods for self-aligned patterning
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US Patent 10083834 Methods of forming self-aligned vias
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US Patent 10319636 Deposition and treatment of films for patterning
Patent Primary Examiner
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Elias Ullah
1
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