US Patent 10699930 Buffer chamber wafer heating mechanism and supporting robots
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Patent Number
106999300
Date of Patent
June 30, 2020
0Patent Application Number
161277020
Date Filed
September 11, 2018
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US Patent 10699930 Buffer chamber wafer heating mechanism and supporting robots
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10699930
Date of patent
June 30, 2020
Patent application number
16127702
Date Filed
September 11, 2018
Patent citations
Patent primary examiner
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